Semiconductor packages

ABSTRACT

A semiconductor package includes a semiconductor die, a thermal conductive through via and a conductive paste. The thermal conductive through via is electrically insulated from the semiconductor die. The conductive paste is disposed over the semiconductor die, wherein the thermal conductive through via is thermally coupled to the semiconductor die through the conductive paste.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of a prior application Ser. No. 17/168,186, filed onFeb. 5, 2021. The prior application Ser. No. 17/168,186 is acontinuation application of and claims the priority benefit of a priorapplication Ser. No. 16/431,747, filed on Jun. 5, 2019. The priorapplication Ser. No. 16/431,747 claims the priority benefit of U.S.provisional application Ser. No. 62/691,627, filed on Jun. 29, 2018. Theentirety of each of the above-mentioned patent applications is herebyincorporated by reference herein and made a part of this specification.

BACKGROUND

In the packaging of integrated circuits, semiconductor dies may bepackaged by a molding compound, and may be bonded to other packagecomponents such as interposers and package substrates. Heat dissipationis a challenge in the semiconductor packages. There exists a bottleneckin efficiently dissipating the heat generated in the inner dies of thesemiconductor packages.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is an exemplary flow chart showing the process steps of a methodof forming a semiconductor package in accordance with some embodiments.

FIG. 2A to FIG. 2I are cross-sectional views of a method of forming asemiconductor package in accordance with some embodiments.

FIG. 3 is a simplified top view of FIG. 2I.

FIG. 4 is a simplified top view of a semiconductor package in accordancewith some embodiments.

FIG. 5 is a simplified top view of a semiconductor package in accordancewith some embodiments.

FIG. 6 is a simplified top view of a semiconductor package in accordancewith some embodiments.

FIG. 7 is a simplified top view of a semiconductor package in accordancewith some embodiments.

FIG. 8 is a simplified top view of a semiconductor package in accordancewith some embodiments.

FIG. 9 is a schematic cross sectional view illustrating a semiconductorpackage in accordance with some embodiments.

FIG. 10 is a schematic cross sectional view illustrating a semiconductorpackage in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

In addition, terms, such as “first,” “second,” “third,” “fourth,” andthe like, may be used herein for ease of description to describe similaror different element(s) or feature(s) as illustrated in the figures, andmay be used interchangeably depending on the order of the presence orthe contexts of the description.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution circuit structure or on asubstrate that allows the testing of the 3D packaging or 3DIC, the useof probes and/or probe cards, and the like. The verification testing maybe performed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIG. 1 is an exemplary flow chart showing the process steps of a methodof forming a semiconductor package in accordance with some embodiments.FIG. 2A to FIG. 2I are cross-sectional views of a method of forming asemiconductor package in accordance with some embodiments. FIG. 3 is asimplified top view of FIG. 2I. For simplicity and clarity ofillustration, only few elements such as a semiconductor die, throughvias, a thermal conductive pattern and a thermal conductive layer areshown in the simplified top view of FIG. 3 .

Referring to FIG. 1 and FIG. 2A, in Step S10, a carrier 102 with abuffer layer 104 coated thereon is provided. In some embodiments, thecarrier 102 may be a glass carrier or any suitable carrier for carryinga semiconductor wafer or a reconstituted wafer for the manufacturingmethod of the semiconductor package. In some embodiments, the bufferlayer 104 includes a debond layer, and the material of the debond layermay be any material suitable for bonding and debonding the carrier 102from the above layers or wafer disposed thereon. In some embodiments,the buffer layer 104 includes, for example, a light-to-heat conversion(“LTHC”) layer, and such layer enables debonding from the carrier byapplying laser irradiation. In some embodiments, the buffer layer 104may further include a dielectric layer between the debond layer and thecarrier 102, and the dielectric layer is made of a dielectric materialincluding benzocyclobutene (“BCB”), polybenzooxazole (“PBO”) or anyother suitable polymer-based dielectric material.

In Step S20, a through via 106 a, 106 b and a thermal conductive pattern108 are formed over the buffer layer 104. In some embodiments, aplurality of through vias 106 a, 106 b are formed on the buffer layer104 to surround an area for a semiconductor die, for example. In someembodiments, as shown in FIG. 3 , the through vias 106 a, 106 b may bearranged along at least one ring-shaped path surrounding the area forthe semiconductor die. In some embodiments, a first group of the throughvias 106 a is arranged along a first ring-shaped path, and a secondgroup of the through vias 106 b is arranged along a second ring-shapedpath surrounding the first ring-shaped path, for example. In otherwords, the through vias 106 a is disposed between the through via 106 band the area for the semiconductor die. In some embodiments, the throughvias 106 a, 106 b of the same group may be arranged regularly, that is,a distance between the adjacent through vias 106 a, 106 b of the samegroup is constant. In some alternative embodiments, the through vias 106a, 106 b of the same group may be arranged irregularly or randomly, thatis, a distance between the through vias 106 a, 106 b of the same groupis not constant. In some alternative embodiments, the through vias maybe arranged along one ring-shaped path or more than two ring-shapedpaths. In some alternative embodiments, when the through vias arearranged along more than two ring-shaped paths, the distance betweenadjacent groups of the through vias may be constant.

In some embodiments, the material of the through via 106 a, 106 bincludes copper (Cu), aluminum (Al), aluminum copper alloy (AlCu), gold,titanium, cobalt, an alloy, or any suitable conductive material. Thethrough via 106 a, 106 b may be formed by, for example, electrochemicalplating (ECP), electroplating, electroless plating or any other suitableprocess.

In some embodiments, the thermal conductive pattern 108 is disposed onthe buffer layer 104 between the through vias 106 a, 106 b and the areafor the semiconductor die. In some embodiments, the thermal conductivepattern 108 includes a plurality of discrete through vias 108 a, forexample. In some embodiments, the through vias 108 a are arranged alongone ring-shaped path P1 surrounding the area for the semiconductor die,for example. In some embodiments, the through vias 108 a may be arrangedregularly, that is, a distance between the adjacent through vias 108 ais constant. In some alternative embodiments, the through vias 108 a maybe arranged irregularly or randomly, that is, a distance between thethrough vias 108 a is not constant. In some alternative embodiments, thering-shaped path P1 is rectangular, for example. However, thering-shaped path P1 may be designed as other suitable ring shape such ascircle, square or polygon depending on the shape of the semiconductordie and/or requirements.

Herein, the through via 106 a, 106 b indicates functional through via,and the through via 108 a indicate non-functional through via.Specifically, the through via 106 a, 106 b in a package structure iselectrically connected to a front-side or back-side redistributioncircuit structure or an electrical component of the same packagestructure or another package structure. However, the through via 108 amay be at a floating potential and electrically insulated from afront-side or back-side redistribution circuit structure or anelectrical component of the same package structure or another packagestructure.

In some embodiments, as shown in FIG. 3 , the through via 108 a may bepartially aligned with the through via 106 a, 106 b in at least one of afirst direction and a second direction which are perpendicular to astacking direction along which the die and the semiconductor device arestacked. In some embodiments, the first direction and the seconddirection are horizontal directions such as x-direction and y-direction,and the stacking direction is a vertical direction such as z-direction,for example. In some alternative embodiments, the through via 108 a maybe not aligned with the through via 106 a, 106 b in the first directionand/or second direction. In some embodiments, a distance between thethrough via 108 a and the area for the semiconductor die may be smallerthan a distance between the adjacent through vias 106 a, 108 a. However,in some alternative embodiments, the distance between the through via108 a and the area for the semiconductor die may be larger than orsubstantially equal to the distance between the adjacent through vias106 a, 108 a. In some embodiments, the distance between the adjacentthrough vias 106 a, 108 a may be larger than the distance between theadjacent through vias 106 a, 106 b. In some embodiments, the distancebetween the adjacent through vias 106 a, 108 a may be two or more timeslonger than the distance between the adjacent through vias 106 a, 106 b.For example, the distance between the adjacent through vias 106 a, 108 amay be three, four, five or six times longer than the distance betweenthe adjacent through vias 106 a, 106 b. However, in some alternativeembodiments, the distance between the adjacent through vias 106 a, 108 amay be smaller than or substantially equal to the distance between theadjacent through vias 106 a, 106 b.

In some embodiments, a top surface of the thermal conductive pattern 108may be substantially flush and coplanar with top surfaces of the throughvias 106 a, 106 b. In some embodiments, the top surfaces of the throughvias 108 a may be substantially flush and coplanar with the top surfacesof the through vias 106 a, 106 b, for example. However, in somealternative embodiments, the top surface of the thermal conductivepattern 108 may be lower than or higher than the top surfaces of thethrough vias 106 a, 106 b.

In some embodiments, the material of the thermal conductive pattern 108includes copper (Cu), aluminum (Al), aluminum copper alloy (AlCu), gold,titanium, cobalt, an alloy, or any other suitable conductive material.The thermal conductive pattern 108 may be formed by, for example,electrochemical plating (ECP), electroplating, electroless plating orany other suitable process. In some embodiments, the material of thethermal conductive pattern 108 may be the same as the material of thethrough vias 106 a, 106 b, for example. In some alternative embodiments,the material of the thermal conductive pattern 108 may be different fromthe material of the through vias 106 a, 106 b. In some embodiments, thethermal conductive pattern 108 and the through vias 106 a, 106 b may beformed simultaneously. For example, the through vias 108 a and thethrough vias 106 a, 106 b may be formed simultaneously. In someembodiments, for plating uniformity, a dimension (e.g., width W2) of thethrough via 108 a ranges from one half to two times of a dimension(e.g., width W1) of one of the through via 106 a, 106 b. In someembodiments, the width W2 is less than the width W1, for example. Insome alternative embodiments, the through vias 106 a, 106 b and thethermal conductive pattern 108 may be formed separately.

Referring to FIG. 1 and FIG. 2B, in Step S30, a semiconductor die 110 isprovided and disposed on the exposed buffer layer 104 over the carrier102. In some embodiments, the semiconductor die 110 may be a digitalchip, an analog chip or a mixed signal chip, such as anapplication-specific integrated circuit (“ASIC”) chip, a sensor chip, awireless and radio frequency chip, a memory chip, a logic chip, avoltage regulator chip or any other suitable chip. In some embodiments,the semiconductor die 110 is a system on chip (SoC), for example. Insome embodiments, the semiconductor die 110 includes a substrate 112, anactive surface 114 a, a rear surface 114 b opposite to the activesurface 114 a, a plurality of pads 116 distributed on the active surface114 a, a passivation layer 118 covering the active surface 114 a, aplurality of metal posts 120 and a protection layer 122. The substrate112 may be a semiconductor substrate, such as a silicon substrate,although it may be formed of other semiconductor materials including,and not limited to, silicon germanium, silicon carbon, gallium arsenide,or the like. The semiconductor die 110 may include a device layer formedin or on the substrate 112. In some embodiments, the device layer mayinclude transistors, resistors, capacitors, inductors, and/or the like.The pads 116 may be formed on and electrically connected to the devicelayer and may be pads of an interconnect structure. The pads 116 arepartially exposed by the passivation layer 118, and the metal posts 120are disposed on and electrically connected to the pads 116. The pads 116are aluminum contact pads, for example. The metal posts 120 are copperposts or copper alloy posts, for example. The protection layer 122covers the metal posts 120 and the passivation layer 118. In somealternative embodiments, before placing the semiconductor die 110 on thecarrier 102, the metal posts 120 are uncovered (i.e., bare dies notmolded or encapsulated). In some embodiments, the protection layer 122is a polymer layer. For example, the protection layer 122 includes aphoto-sensitive material such as PBO, polyimide, BCB, a combinationthereof, or the like.

In some embodiments, a top surface of the semiconductor die 110 is notcoplanar with the top surfaces of the through vias 106 a, 106 b and thethermal conductive pattern 108. In some embodiments, the top surface ofthe semiconductor die 110 is lower than the top surfaces of the throughvias 106 a, 106 b and the thermal conductive pattern 108, for example.In some alternative embodiments, the top surface of the semiconductordie 110 may be substantially flush with or higher than the top surfacesof the through vias 106 a, 106 b and the thermal conductive pattern 108.In some embodiments, a die attach film 124 is disposed between the rearsurface 114 b of the semiconductor die 110 and the buffer layer 104 forbetter attachment, and the rear surface 114 b of the semiconductor die110 is adhered to the carrier 102. In some embodiments, thesemiconductor die 110 is placed over the carrier 102 in the area asidethe thermal conductive pattern 108. In some embodiments, thesemiconductor die 110 is disposed within the area surrounded by thethermal conductive pattern 108.

In some embodiments, the thermal conductive pattern 108 surround thesemiconductor die 110, and the through vias 106 a, 106 b surround thethermal conductive pattern 108. In other words, the thermal conductivepattern 108 is disposed between the semiconductor die 110 and thethrough vias 106 a, 106 b. Accordingly, a first minimum distance D1between the through via 108 a and the semiconductor die 110 is less thana second minimum distance D2 between through via 106 a and thesemiconductor die 110. In some embodiments, the through vias 106 a, 106b and thermal conductive pattern 108 are respectively distributed atfour sides of the semiconductor die 110, for example. In someembodiments, the through vias 106 a, 106 b and the through vias 108 aare respectively distributed at four sides of the semiconductor die 110,for example. In some embodiments, the distribution of the through vias106 a, 106 b and the through via 108 a at one side of the semiconductordie 110 is substantially symmetrical to the distribution of the throughvias 106 a, 106 b and the through via 108 a at the other side of thesemiconductor die 110. Specifically, the through vias 106 a, 106 b andthe through via 108 a at one side are symmetrical to those at the otherside in configuration and position with respect to the centralsemiconductor die 110. In some embodiments, as shown in FIG. 2B, thedotted line represents the cutting line of the whole package in thesubsequent cutting process and the through vias 106 b are arranged closeto but not on the cutting line, and are arranged around the thermalconductive pattern 108 and the semiconductor die 110.

Referring to FIG. 1 and FIG. 2C, in Step S40, an encapsulant 130 isformed over the carrier 102 to encapsulate the semiconductor die 110,the through via 106 a, 106 b and the thermal conductive pattern 108. Insome embodiments, the encapsulant 130 covers the buffer layer 104 andfills among the semiconductor die 110, the thermal conductive pattern108 and the through vias 106 a, 106 b. In some embodiments, theencapsulant 130 is disposed among the semiconductor die 110, the throughvias 108 a and the through vias 106 a, 106 b. In some embodiments, theencapsulant 130 laterally encapsulates the semiconductor die 110, thatis, sidewalls of the semiconductor die 110 is encapsulated by theencapsulant 130. In some embodiments, the encapsulant 130 is formed byforming a molding material covering the top surfaces of thesemiconductor die 110, the through vias 106 a, 106 b and the thermalconductive pattern 108 by an over-molding process, and then removingportions of the molding material by a planarization process to exposethe top surfaces of the semiconductor die 110, the through vias 106 a,106 b and the thermal conductive pattern 108. In some embodiments, theplanarization process for planarizing the molding material and thesemiconductor die 110, the through vias 106 a, 106 b and the thermalconductive pattern 108 includes a fly cut process, a grinding process, achemical mechanical polishing (“CMP”) process or any other suitableprocess. In some embodiments, portions of the protection layer 122 ofthe semiconductor die 110, the through vias 106 a, 106 b and the thermalconductive pattern 108 are also removed by the planarization process. Insome embodiments, a first surface 130 a of the encapsulant 130 issubstantially coplanar and flush with the top surfaces of the protectionlayer 122 and the metal posts 120 of the semiconductor die 110, thethrough vias 106 a, 106 b and the thermal conductive pattern 108. Insome embodiments, the through vias 106 a, 106 b and the thermalconductive pattern 108 penetrate and are embedded the encapsulant 130,respectively. In some embodiments, the encapsulant 130 includes amolding compound, a molding underfill, a resin such as epoxy, aphoto-sensitive material such as PBO, polyimide, BCB, a combinationthereof, or the like.

Referring to FIG. 1 and FIG. 2D, in Step S50, in some embodiments, aredistribution circuit structure 140 is formed over the encapsulant 130,the semiconductor die 110, the through via 106 a, 106 b and the thermalconductive pattern 108. In some embodiments, the redistribution circuitstructure 140 is formed over the first surface 130 a of the encapsulant130, the active surface 114 a of the semiconductor die 110 and the topsurfaces of the through vias 106 a, 106 b and the thermal conductivepattern 108. In some embodiments, the redistribution circuit structure140 is disposed on the top surfaces of the metal posts 120 of thesemiconductor die 110. In some embodiments, the redistribution circuitstructure 140 is electrically connected to the through vias 106 a, 106 band the semiconductor die 110 and electrically insulated from thethermal conductive pattern 108.

In some embodiments, the redistribution circuit structure 140 includes adielectric layer 142 and a plurality of redistribution patterns 144 inthe dielectric layer 142. In some embodiments, the redistributionpatterns 144 are electrically connected to the through vias 106 a, 106 bor an electrical component of the same package structure such as themetal posts 120 of the semiconductor die 110. In some embodiments, theredistribution patterns 144 is electrically insulated from the thermalconductive pattern 108. In some embodiments, the bottom redistributionpattern 144 of the redistribution circuit structure 140 is in contactwith the through vias 106 a, 106 b and the metal posts 120 of thesemiconductor die 110, for example. In some embodiments, the thermalconductive pattern 108 is electrically insulated from the redistributionpatterns 144 through the dielectric layer 142. In some embodiments, thethermal conductive pattern 108 is in contact with the bottom dielectriclayer 142, for example. In some embodiments, the material of theredistribution patterns 144 includes aluminum, titanium, copper, nickel,tungsten, silver and/or alloys thereof. In some embodiments, thematerial of the dielectric layer 142 includes polyimide,benzocyclobutene, or polybenzooxazole. In some embodiments, thedielectric layer 142 may be a single or multiple layer structure. Insome embodiments, the redistribution circuit structure 140 is afront-side redistribution circuit structure electrically connected tothe semiconductor die 110 and is electrically connected to the throughvias 106 a, 106 b. In some embodiments, as the underlying encapsulant130 provides better planarization and evenness, the later-formedredistribution circuit structure 140, especially the redistributionpattern 144 with thin line width or tight spacing, can be formed withuniform line-widths or even profiles over the flat and level encapsulant130, resulting in improved line/wiring reliability.

In some embodiments, a plurality of conductive elements 146 are disposedon and electrically connected to the redistribution circuit structure140. In some embodiments, prior to disposing the conductive elements146, flux may be applied so that the conductive elements 146 are betterfixed to top redistribution patterns 144 of the redistribution circuitstructure 140, and the top redistribution patterns 144 may function ascontact pads for the conductive elements 146. In some embodiments, theconductive elements 146 are, for example, solder balls or ball gridarray (“BGA”) balls placed on the redistribution circuit structure 140and the top redistribution patterns 144 underlying the conductiveelements 146 functions as ball pads. In some embodiments, some of theconductive elements 146 are electrically connected to the semiconductordie 110 through the redistribution circuit structure 140, and some ofthe conductive elements 146 are electrically connected to the throughvias 106 a, 106 b. In some embodiments, the conductive elements 146 areelectrically insulated from the thermal conductive pattern 108.

Referring to FIG. 1 and FIGS. 2D and 2E, in Step S60, in someembodiments, the whole package is debonded from the carrier 102 toseparate the semiconductor die 110 from the carrier 102. In someembodiments, after debonding from the carrier 102, the buffer layer 104remained on the whole package is removed through an etching process or acleaning process. Alternatively, in some alternative embodiments, thebuffer layer 104 may be remained.

Then, in some embodiments, the whole package is turned upside down anddisposed on a carrier film 150. As the package structure is turnedupside down, the top surfaces may become the bottom surfaces and therelative positional relationships (such as above, below, higher orlower) may become the opposite for the package structures as describedabove, but the same surfaces, common surfaces or interfaces will bemarked with the same reference numbers for the semiconductor package.After debonding from the carrier 102, the die attach film 124 isexposed. In some embodiments, the top surface of the die attach film 124is substantially coplanar and flush with the top surfaces of theencapsulant 130, the through vias 106 a, 106 b and the thermalconductive pattern 108.

After that, the die attach film 124 is removed, and thus a trench 132 isformed in the encapsulant 130 over the semiconductor die 110. In someembodiments, after removing the die attach film 124, the rear surface114 b of the semiconductor die 110 is exposed. In some embodiments, therear surface 114 b of the semiconductor die 110 is lower than a secondsurface 130 b opposite to the first surface 130 a of the encapsulant130. In addition, the rear surface 114 b of the semiconductor die 110 islower than the top surfaces of the through vias 106 a, 106 b and thethermal conductive pattern 108.

Referring to FIG. 1 and FIGS. 2E and 2F, in Step S70, in someembodiments, a thermal conductive layer 160 is formed over thesemiconductor die 110 and the encapsulant 130, wherein the thermalconductive pattern 108 is thermally coupled to the semiconductor die 110through the thermal conductive layer 160. In some embodiments, a heatdissipation structure includes the thermal conductive pattern 108 andthe thermal conductive layer 160. As used herein, being thermallycoupled means that causing a change in temperature of a heat dissipationstructure will cause in a change in temperature of the semiconductor dieand vice-versa. In some embodiments, the thermal conductive layer 160 isformed over the rear surface 114 b of the semiconductor die 110 to fillthe trench 132. Therefore, the thermal conductive layer 160 and theredistribution circuit structure 140 are disposed on opposite sides ofthe semiconductor die 110. In some embodiments, the thermal conductivelayer 160 extends outwardly from the rear surface 114 b of thesemiconductor die 110 to cover portions of the second surface 130 b ofthe encapsulant 130 and the top surface of the thermal conductivepattern 108. In some embodiments, the thermal conductive layer 160covers the second surface 130 b of the encapsulant 130 aside the topsurface of the thermal conductive pattern 108. In some embodiments, thethermal conductive layer 160 is separated from the top surfaces of thethrough vias 106 a, 106 b to electrically insulate from the through vias106 a, 106 b. In other words, edges of the thermal conductive layer 160is separated from edges of the through vias 106 a, and thus the thermalconductive layer 160 is electrically insulated from the through vias 106a.

In some embodiments, the thermal conductive layer 160 may be in contactwith the rear surface 114 b of the semiconductor die 110, the portionsof the second surface 130 b of the encapsulant 130 and the top surfaceof the thermal conductive pattern 108. In some embodiments, the thermalconductive layer 160 covers the top surface of the thermal conductivepattern 108 entirely, for example. However, in some alternativeembodiments, the thermal conductive layer 160 may cover the thermalconductive pattern 108 partially or may not cover the thermal conductivepattern 108.

In some embodiments, the thermal conductive layer 160 includes a firstportion 162 covering the semiconductor die 110 and a second portion 164covering the encapsulant 130 and the thermal conductive pattern 108. Insome embodiments, a top surface of the first portion 162 issubstantially flush with a top surface of the second portion 164, forexample. However, in some alternative embodiments, the top surfaces ofthe first portion 162 and the second portion 164 may not be coplanarwith each other. In some embodiments, the first portion 162 is thickerthan the second portion 164 since a portion of the first portion 162 isfilled in the trench 132. In other words, a thickness T1 of the firstportion 162 from the rear surface 114 b of the semiconductor die 110 toits own top surface is larger than a thickness T2 of the second portion164 from the second surface 130 b of the encapsulant 130 to its own topsurface. In some embodiments, the thickness T2 may be larger than orequal to 5 μm, for example. In some embodiments, an interface betweenthe semiconductor die 110 and the thermal conductive layer 160 is lowerthan an interface between the encapsulant 130 and the thermal conductivelayer 160. The thermal conductive layer 160 is a conductive paste suchas a silver paste, and is formed by a printing process, for example.

Referring to FIG. 1 and FIG. 2G, in Step S80, a semiconductor device 170is stacked over and electrically connected to the semiconductor die 110.In some embodiments, the semiconductor device 170 is a package such as adynamic random access memory (DRAM) package or any other suitablesemiconductor device. In some embodiments, the semiconductor device 170is disposed on the thermal conductive layer 160 over the semiconductordie 110, and the thermal conductive layer 160 is disposed between thesemiconductor die 110 and the semiconductor device 170. In someembodiments, the semiconductor device 170 includes a plurality ofcontacts 172. The contacts 172 may be pads or metal posts on the pads,for example. The contacts 172 of the semiconductor device 170 areelectrically connected to the redistribution circuit structure 140through conductive elements 174 and the through vias 106 a, 106 b. Insome embodiments, the conductive elements 174 are, for example, solderballs or BGA balls placed on the semiconductor device 170. In someembodiments, a gap G is formed between the semiconductor device 170 andthe thermal conductive layer 160, that is, the gap G is less than aheight of the conductive element 174. Accordingly, the thermalconductive layer 160 is not in contact with and thus electricallyinsulated from the semiconductor device 170. In some embodiments, thegap G may range from 25% to 40% of the height of the conductive element174, for example. In some embodiments, a vertical distance between thesemiconductor die 110 and the semiconductor device 170 may range from 50to 60 μm, and the gap G may be larger than 10 μm, for example. In somealternative embodiments, at least a portion of the thermal conductivelayer 160 is in direct contact with the second die 170. In other words,portions of the thermal conductive layer 160 may be in contact with thesecond die 170, portions of the thermal conductive layer 160 may beseparated from the second die 170 by a distance, and a top surface ofthe thermal conductive layer 160 may be not flat, for example.

Referring to FIG. 2H, in some embodiments, an underfill 176 is formedamong the conductive elements 174, the semiconductor device 170 and thethermal conductive layer 160. Therefore, the gap G is filled with theunderfill 176. In some embodiments, the underfill 176 in the gap Gbetween the semiconductor device 170 and the thermal conductive layer160 ensures the electrical insulation between the semiconductor device170 and the thermal conductive layer 160.

Referring to FIGS. 1, 2H and 2I, in some embodiments, a dicing processis performed to cut the whole package structure (at least cutting thoughthe encapsulant 130 and the redistribution circuit structure 140) alongthe cutting line (the dotted line) into individual and separatedsemiconductor packages 100, as shown in FIG. 2I. In one embodiment, thedicing process is a wafer dicing process including mechanical bladesawing or laser cutting. In some embodiments, the semiconductor package100 is a integrated fan-out Package-on-Package (InFO PoP) device, forexample. In some alternative embodiments, the semiconductor package 100may be further mounted on an electronic device, the electronic devicemay be a board such as a printed circuit board (PCB), for example. Insome alternative embodiments, the semiconductor package 100 may bemounted with additional packages, chips/dies or other electronicdevices.

In some embodiments, as shown in FIG. 2I, the through vias 106 a, 106 band the thermal conductive pattern 108 are embedded in the encapsulant130 aside the semiconductor die 110, and the thermal conductive layer160 is disposed on the semiconductor die 110 and extends onto theencapsulant 130. The through vias 106 a, 106 b are electricallyconnected to the semiconductor die 110, and the thermal conductivepattern 108 is electrically insulated from the semiconductor die 110 butthermally coupled to the semiconductor die 110 through thermalconductive layer 160. Accordingly, the heat generated by any componentof the semiconductor package 100 such as the semiconductor die 110 orthe semiconductor device 170 may be dissipated through the thermalconductive layer 160 and the thermal conductive pattern 108, and thethermal dissipation area for the semiconductor package 100 is expanded.Thus, for example, compared to the conventional semiconductor packagewithout the thermal conductive pattern and the thermal conductive layer,the conventional semiconductor package with the thermal conductive layer(which is not in contact with the semiconductor device) and without thethermal conductive pattern, or the conventional semiconductor packagewith the thermal conductive layer (which is in contact with thesemiconductor device) and without the thermal conductive pattern, thethermal dissipation efficiency of the semiconductor die may be improved.

In some embodiments, the thermal conductive pattern 108 is illustratedas having a plurality of discrete through vias 108 a arranged along onering-shaped path P1, however, the disclosure is not limited thereto. Inother words, the thermal conductive pattern may be arranged along aplurality of ring-shaped paths. In some embodiments, as shown in FIG. 4, the thermal conductive pattern 108 may include a plurality of throughvias 108 a, 108 b arranged along a plurality of ring-shaped paths P1,P2. In some embodiments, a first group of discrete through vias 108 a isarranged along the first ring-shaped path P1, a second group of discretethrough vias 108 b is arranged along the second ring-shaped path P2surrounding the first ring-shaped path P1, and the ring-shaped paths P1,P2 respectively surround the semiconductor die 110. In some embodiments,the second group of the through via 108 b is disposed between the firstgroup of the through via 108 a and the first group of the through vias106 a. In some embodiments, a width of the through via 108 a may be thesame as or different from a width of the through via 108 b. In someembodiments, in the direction perpendicular to the stacking direction ofthe semiconductor die 110 and the semiconductor device 170, one of thethrough vias 108 a of the first group is partially aligned with one ofthe through vias 108 b of the second group, for example. In addition,the aligned through via 108 a, 108 b may be further aligned with thealigned through via 106 a and the through via 106 b. However, in somealternative embodiments, the through vias 106 a, 106 b may be notaligned with each other or may be not aligned with the through vias 108a, 108 b. For example, in some embodiments, as shown in FIG. 5 , in thedirection perpendicular to the stacking direction, one of the throughvias 108 a of the first group and one of the through vias 108 b of thesecond group are immediately adjacent to each other, and they may bedisposed alternately. In addition, in some embodiments, the through via106 a and the through via 106 b immediately adjacent to each other maybe also disposed alternately. In some embodiments, in the directionperpendicular to the stacking direction, one of the through vias 108 aof the first group may be partially aligned with one of the through vias106 a of the first group, and similarly, one of the through vias 108 bof the second group is partially aligned with one of the through vias106 b of the second group, for example.

The thermal conductive pattern 108 may have other configurations. Forexample, as shown in FIG. 6 , the thermal conductive pattern 108includes a ring-shaped structure 108 c surrounding the semiconductor die110. The ring-shaped structure 108 c is continuously formed along aring-shaped path P. In other words, the ring-shaped structure 108 c iscontinuously disposed around the semiconductor die 110. In someembodiments, a width W2 of the ring-shaped structure 108 c may besubstantially the same, and the width W2 may range from one half to twotimes of a dimension (e.g., width W1) of one of the through via 106 a,106 b, for example. In some alternative embodiments, the thermalconductive pattern 108 may include a plurality of ring-shaped structuresrespectively disposed along a plurality of ring-shaped paths surroundingthe semiconductor die 110.

In some embodiments, as shown in FIG. 7 and FIG. 8 , the thermalconductive pattern 108 may include a plurality of discrete wall-shapedstructures 108 d. The wall-shaped structures 108 d are separated fromeach other, and the wall-shaped structures 108 d are arranged along onering-shaped path P. In some embodiments, as shown in FIG. 7 , thewall-shaped structures 108 d are respectively disposed at one side ofthe semiconductor die 110. In some embodiments, the wall-shapedstructures 108 d is a cuboid, for example. In some embodiments, as shownin FIG. 8 , at least one wall-shaped structure 108 d may be disposed attwo adjacent sides of the semiconductor die 110. In some alternativeembodiments, one wall-shaped structure 108 d may be disposed at three orfour adjacent sides of the semiconductor die 110, for example. In someembodiments, a width W2 of the wall-shaped structures 108 d may besubstantially the same, and the width W2 may range from one half to twotimes of a dimension (e.g., width W1) of one of the through via 106 a,106 b, for example. In some alternative embodiments, the width W2 of thewall-shaped structures 108 d may be different. In some alternativeembodiments, the wall-shaped structures 108 d may be arranged along aplurality of ring-shaped paths respectively surrounding thesemiconductor die 110. Additionally, it is noted that in FIGS. 3-8 , thedistance between the semiconductor die 110 and the thermal conductivepattern 108 or between the thermal conductive pattern 108 and thethrough via 106 a are exemplified for illustration, actually, in someembodiments, the above distance may be larger than the distance betweenthe adjacent two through vias 106 a, 106 b, for example. However, insome alternative embodiments, the above distance may be equal to orsmaller than the distance between the adjacent two through vias 106 a,106 b. Furthermore, the material of the thermal conductive pattern 108in FIGS. 3-8 may be conductive material such as those described for thethrough vias 108 a.

In above embodiments, the thermal conductive pattern is illustrated asarranged along one ring-shaped path or two ring-shaped paths, however,the disclosure is not limited thereto. In other words, the thermalconductive pattern may be arranged along more than two ring-shapedpaths. In addition, the ring-shaped paths may have the same or differentshape, and the spacing between the components of the thermal conductivepattern along the adjacent two ring-shaped paths may be the same ordifferent.

FIG. 9 is a schematic cross sectional view illustrating a semiconductorpackage in accordance with some embodiments. The difference between thesemiconductor package of FIG. 9 and the semiconductor package of FIG. 2Ilies in that the redistribution circuit structure further includes adummy pattern. The difference is illustrated in details below, and thesimilarity is not iterated herein. In some embodiments, as shown in FIG.9 , the redistribution circuit structure 140 further includes a dummypattern 148 electrically insulated from the redistribution patterns 144in the package structure or an electrical component of the same packagestructure or another package structure. In some embodiments, the dummypattern 148 is disposed at the bottom of the redistribution circuitstructure 140. In some embodiments, the dummy pattern 148 is disposed onthe first surface 130 a of the encapsulant 130 and disposed in thedielectric layer 142 of the redistribution circuit structure 140. Insome embodiments, the thermal conductive pattern 108 is connected to thedummy pattern 148, which means the thermal conductive pattern 108 iselectrically connected to the dummy pattern 148. In some embodiments,the thermal conductive pattern 108 may be in contact with the dummypattern 148, for example. In some embodiments, the thermal conductivepattern 108 is thermally coupled to the thermal conductive layer 160 ata first side, and thermally coupled to the dummy pattern 148 at a secondside opposite to the first side. Accordingly, the heat generated by thesemiconductor package may be dissipated through the thermal conductivelayer 160, the thermal conductive pattern 108 and the dummy pattern 148,and the thermal dissipation area for the semiconductor die 110 isexpanded. Thus, the thermal dissipation efficiency may be improved.

FIG. 10 is a schematic cross sectional view illustrating a semiconductorpackage in accordance with some embodiments. The difference between thesemiconductor package of FIG. 10 and the semiconductor package of FIG.2I lies in that the semiconductor package further includes a die attachfilm. The difference is illustrated in details below, and the similarityis not iterated herein. In some embodiments, as shown in FIG. 10 , if adie attach film 124 has good thermal conductivity, the die attach film124 may be not removed before forming a thermal conductive layer 160,and thus the die attach film 124 may be disposed between thesemiconductor die 110 and the thermal conductive layer 160, for example.In some embodiments, the thermal conductive layer 160 may substantiallyhave a constant thickness T, that is, a first potion 162 over thesemiconductor die 110 and a second potion 164 over the encapsulant 130and the thermal conductive pattern 108 may substantially have the samethickness T. The thickness T may be larger than or equal to 5 μm, forexample.

In some embodiments, the semiconductor package has the heat dissipationstructure thermally coupled to the semiconductor die. In someembodiments, the heat dissipation structure includes the thermalconductive pattern aside the semiconductor die and the thermalconductive layer disposed on the semiconductor die and extending ontothe thermal conductive pattern. Thus, the thermal conductive pattern maybe thermally coupled to the semiconductor die through the thermalconductive layer. By disposing the heat dissipation structure, thethermal dissipation area for the semiconductor package may be largelyexpanded, and the heat dissipation efficiency of the semiconductorpackage may be significantly improved. In addition, although the thermalconductive layer is disposed between the semiconductor die and thesemiconductor device, a height of the thermal conductive layer iscontrolled to prevent from being in contact with the semiconductordevice thereover. Accordingly, cold joint risk such as PoW (Package onWafer) cold joint risk and other process issue may be prevented.Furthermore, the extension of the thermal conductive layer onto theencapsulant and the thermal conductive pattern increases the contactarea between the semiconductor die and the thermal conductive layer,thereby enhancing the adhesion of the thermal conductive layer to thesemiconductor die. Therefore, the thermal dissipation of thesemiconductor package is stable and improved.

According to some embodiments, a semiconductor package includes asemiconductor die, a thermal conductive pattern, an encapsulant and athermal conductive layer. The thermal conductive pattern is disposedaside the semiconductor die. The encapsulant encapsulates thesemiconductor die and the thermal conductive pattern. The thermalconductive layer covers a rear surface of the semiconductor die, whereinthe thermal conductive pattern is thermally coupled to the semiconductordie through the thermal conductive layer and electrically insulated fromthe semiconductor die.

According to some embodiments, a semiconductor package includes asemiconductor die, an encapsulant, a first through via, a second throughvia and a thermal conductive layer. The encapsulant laterallyencapsulates the semiconductor die. The first through via is embedded inthe encapsulant and electrically connected to the semiconductor die. Thesecond through via is embedded in the encapsulant and electricallyinsulated from the semiconductor die. The thermal conductive layercovers the semiconductor die, wherein the second through via isthermally coupled to the semiconductor die through the thermalconductive layer.

According to some embodiments, a semiconductor package includes asemiconductor die, an encapsulant, a first through via, a second throughvia and a thermal conductive layer. The encapsulant laterallyencapsulates the semiconductor die. The first through via is embedded inthe encapsulant and electrically connected to the semiconductor die. Thesecond through via is embedded in the encapsulant and electricallyinsulated from the semiconductor die. The thermal conductive layercovers the semiconductor die and the encapsulant, wherein the thermalconductive layer comprises a first portion covering the semiconductordie and a second portion covering the second through via, and the firstportion of the thermal conductive layer is thicker than a second portionof the thermal conductive layer.

According to some embodiments, a semiconductor package includes asemiconductor die, a first thermal conductive pattern and a secondthermal conductive pattern. The semiconductor die is encapsulated by anencapsulant. The first thermal conductive pattern is disposed aside thesemiconductor die in the encapsulant. The second thermal conductivepattern is disposed over the semiconductor die, wherein the firstthermal conductive pattern is thermally coupled to the semiconductor diethrough the second thermal conductive pattern and electrically insulatedfrom the semiconductor die.

According to some embodiments, a semiconductor package includes asemiconductor die, a through via, a heat dissipation pattern and a heatdissipation material. The through via is disposed aside and electricallyconnected to the semiconductor die. The heat dissipation pattern isdisposed between and electrically insulated from the semiconductor dieand the through via. The heat dissipation material is disposed over thesemiconductor die, wherein the heat dissipation pattern is thermallycoupled to the semiconductor die through the heat dissipation material.

According to some embodiments, a semiconductor package includes asemiconductor die, a semiconductor device, a plurality of through vias,a thermal conductive pattern and a thermal conductive material. Thesemiconductor die is encapsulated by an encapsulant. The semiconductordevice is disposed over the semiconductor die and the encapsulant. Thethrough vias are embedded in the encapsulant and surround thesemiconductor die and are electrically connected to the semiconductordevice. The thermal conductive pattern is embedded in the encapsulantand electrically insulated from the semiconductor die. The thermalconductive material is disposed between the semiconductor die and thesemiconductor device, wherein the thermal conductive pattern isthermally coupled to the semiconductor die through the thermalconductive material.

According to some embodiments, a semiconductor package includes asemiconductor die, a thermal conductive through via and a conductivepaste. The thermal conductive through via is electrically insulated fromthe semiconductor die. The conductive paste is disposed over thesemiconductor die, wherein the thermal conductive through via isthermally coupled to the semiconductor die through the conductive paste.

According to some embodiments, a semiconductor package includes asemiconductor die, a semiconductor device, a through via, a thermalconductive pattern and a thermal conductive material. The semiconductordevice is disposed over the semiconductor die. The through via iselectrically connected to the semiconductor device. The thermalconductive pattern is disposed between the semiconductor die and thethrough via and electrically insulated from the semiconductor die. Thethermal conductive material is disposed between the semiconductor dieand the semiconductor device, wherein the thermal conductive pattern isthermally coupled to the semiconductor die through the thermalconductive material.

According to some embodiments, a semiconductor package includes asemiconductor die, a semiconductor device, a thermal conductive pattern,a thermal conductive material and an underfill. The semiconductor deviceis disposed over the semiconductor die. The thermal conductive patternis electrically insulated from the semiconductor die. The thermalconductive material is disposed between the semiconductor die and thesemiconductor device, wherein the thermal conductive pattern isthermally coupled to the semiconductor die through the thermalconductive material. The underfill is disposed between the thermalconductive material and the semiconductor device.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor package, comprising: asemiconductor die; a thermal conductive through via, electricallyinsulated from the semiconductor die; and a conductive paste over thesemiconductor die, wherein the thermal conductive through via isthermally coupled to the semiconductor die through the conductive paste.2. The semiconductor package as claimed in claim 1 further comprising anencapsulant encapsulating the semiconductor die and the thermalconductive through via.
 3. The semiconductor package as claimed in claim1, wherein the conductive paste is in direct contact with the thermalconductive through via.
 4. The semiconductor package as claimed in claim1, wherein the conductive paste comprises a first portion covering thesemiconductor die and a second portion covering the thermal conductivethrough via, and the first portion is thicker than the second portion.5. The semiconductor package as claimed in claim 1 further comprising athrough via, wherein the thermal conductive through via is disposedbetween the semiconductor die and the through via and electricallyinsulated from the through via.
 6. A semiconductor package, comprising:a semiconductor die; a semiconductor device over the semiconductor die;a through via, electrically connected to the semiconductor device; athermal conductive pattern disposed between the semiconductor die andthe through via and electrically insulated from the semiconductor die;and a thermal conductive material between the semiconductor die and thesemiconductor device, wherein the thermal conductive pattern isthermally coupled to the semiconductor die through the thermalconductive material.
 7. The semiconductor package as claimed in claim 6further comprising an encapsulant encapsulating the semiconductor dieand the through via.
 8. The semiconductor package as claimed in claim 6,wherein the thermal conductive pattern comprises a plurality of discretethermal conductive through vias surrounding the semiconductor die. 9.The semiconductor package as claimed in claim 6, wherein the thermalconductive pattern comprises a ring-shaped structure surrounding thesemiconductor die.
 10. The semiconductor package as claimed in claim 6,wherein the thermal conductive pattern comprises a plurality of discretewall-shaped structures.
 11. The semiconductor package as claimed inclaim 6 further comprising an underfill between the thermal conductivematerial and the semiconductor device.
 12. The semiconductor package asclaimed in claim 6, wherein a material of the thermal conductive patternis the same as a material of the through via.
 13. The semiconductorpackage as claimed in claim 6, wherein the thermal conductive materialis a conductive paste.
 14. A semiconductor package, comprising: asemiconductor die; a semiconductor device over the semiconductor die; athermal conductive pattern, electrically insulated from thesemiconductor die; a thermal conductive material between thesemiconductor die and the semiconductor device, wherein the thermalconductive pattern is thermally coupled to the semiconductor die throughthe thermal conductive material; and an underfill between the thermalconductive material and the semiconductor device.
 15. The semiconductorpackage as claimed in claim 14 further comprising an encapsulantencapsulating the semiconductor die and disposed beneath thesemiconductor device.
 16. The semiconductor package as claimed in claim14, wherein the thermal conductive material has a same thickness on theencapsulant and on the semiconductor die.
 17. The semiconductor packageas claimed in claim 14 further comprising a die attach film between thethermal conductive material and the semiconductor die.
 18. Thesemiconductor package as claimed in claim 14 further comprising a dummypattern in direct contact with the thermal conductive pattern anddisposed beneath the semiconductor die.
 19. The semiconductor package asclaimed in claim 18 further comprising a through via aside thesemiconductor die and a conductive pattern electrically connected to thethrough via, wherein a first surface of the dummy pattern issubstantially coplanar with a first surface of the conductive pattern,and a second surface opposite to the first surface of the dummy patternis substantially coplanar with a second surface opposite to the firstsurface of the conductive pattern.
 20. The semiconductor package asclaimed in claim 14, wherein the thermal conductive pattern is in directcontact with the thermal conductive material.